Sputtering Targets - Fluorides

EVOCHEM’s product program offers a wide range of Fluorides. Besides the high purity of these compounds, some fluorides like Magnesium Fluoride and Lanthanum Fluoride are very reliable materials especially suitable for DUV/VUV.

Please provide us with full details on the material, purity, dimensions, any special tolerances and the quantity required. We are pleased to provide a tailor made quotation.

Name	Formula	Purities
Aluminum Fluoride - Sputtering Target	AlF3	4N
Barium Fluoride - Sputtering Target	BaF2	3N-3N5
Calcium Fluoride - Sputtering Target	CaF2	3N-4N
Cerium Fluoride - Sputtering Target	CeF2	3N-4N
Cryolite - Sputtering Target	Na3AIF6	4N
Dysprosium Fluoride - Sputtering Target	DyF3	3N
Erbium Fluoride - Sputtering Target	ErF3	4N
Lanthanum Fluoride - Sputtering Target	LaF4	4N
Lead Fluoride - Sputtering Target	PbF2	2N5
Lithium Fluoride - Sputtering Target	LiF	2N
Praseodymium Fluoride - Sputtering Target	PrF3	2N5
Magnesium Fluoride - Sputtering Target	MgF2	3N-5N
Neodymium Fluoride - Sputtering Target	NdF3	3N
Samarium Fluoride - Sputtering Target	SmF3	3N
Sodium Fluoride - Sputtering Target	NaF	3N
Strontium Fluoride - Sputtering Target	SrF2	3N
Yttrium Fluoride - Sputtering Target	YF3	4N
Ytterbium Fluoride - Sputtering Target	YbF3	4N-5N

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