EVOCHEM’s product program contains a wide range of oxide sputtering targets optimized for the special requirements of Sputtering Processes.
Our oxide sputtering targets offer a better yield, process stability and more design freedom for the optical coating engineer.
Many oxide sputtering targets require bonding. Please contact us if you should gave any questions or if your required sputtertarget material is not listed.
| Name | Formula | Purities |
|---|---|---|
| Aluminum Oxide - Sputtering Target | Al2O3 | 2N-4N |
| Aluminum Zinc Oxide - Sputtering Target | AZO | 3N |
| Antimony Oxide - Sputtering Target | Sb2O3 | 3N |
| Antimony:Tin Dioxide - Sputtering Target | ATO | 3N5 |
| Barium Titanate - Sputtering Target | BaTiO3 | 2N6-4N |
| Bismuth Oxide - Sputtering Target | Bi2O3 | 3N |
| Cerium Oxide - Sputtering Target | CeO2 | 2N-3N5 TREO: 2N min |
| Copper Oxide - Sputtering Target | CuO | 3N |
| Chromium Oxide - Sputtering Target | Cr2O3 | 3N |
| Dysprosium Oxide - Sputtering Target | Dy2O3 | 4N-5N TREO: 2N5-3N5 |
| Erbium Oxide - Sputtering Target | Er2O3 | 4N-5N TREO: 2N5-3N5 |
| Europium Oxide - Sputtering Target | Eu2O3 | 2N-3N5 TREO: 2N-3N |
| Gadolinium Oxide - Sputtering Target | Gd2O3 | 3N-4N5 TREO: 2N min |
| Gallium Zinc Oxide - Sputtering Target | GZO | 3N |
| Hafnium Oxide - Sputtering Target | HfO2 | 2N-4N |
| Holmium Oxide - Sputtering Target | Ho2O3 | 3N-4N5 TREO: 2N min |
| Indium Oxide - Sputtering Target | In2O3 | 4N |
| Indium Tin Oxide - Sputtering Target | ITO | 4N-5N |
| Indium Zinc Oxid - Sputtering Target | IZO | 4N-5N |
| Iron Oxide - Sputtering Target | Fe2O3 | 3N |
| Iron Oxide - Sputtering Target | Fe3O4 | 3N |
| Lanthanum Aluminate - Sputtering Target | LaAlO3 | 3N |
| Lead Titanate - Sputtering Target | PbTiO3 | 3N |
| Lead Zirconate - Sputtering Target | PbZrO3 | 4N |
| Lead Zirconate Titanate - Sputtering Target | PZT | 3N |
| Lutetium Oxide - Sputtering Target | Lu2O3 | 2N-3N TREO: 2N min |
| Magnesium Oxide - Sputtering Target | MgO | 4N |
| Molybdenum Oxide - Sputtering Target | MoO3 | 2N8-3N |
| Neodymium Oxide - Sputtering Target | Nd2O3 | 2N-3N TREO: 2N min |
| Nickel Oxide - Sputtering Target | NiO | 3N |
| Niobium Pentoxide - Sputtering Target | Nb2O5 | 2N-5N |
| Praseodymium Oxide - Sputtering Target | Pr6O11 | 2N-3N TREO: 2N min |
| Samarium Oxide - Sputtering Target | Sm2O3 | 2N-3N TREO: 2N min |
| Scandium Oxide - Sputtering Target | Sc2O3 | 4N-5N TREO: 2N5-3N5 |
| Silicon Dioxide - Sputtering Target | SiO2 | 2N-4N |
| Silicon Monoxide - Sputtering Target | SiO | 3N-4N |
| Strontium Titanate - Sputtering Target | SrTiO3 | 3N |
| Tantalum Pentoxide - Sputtering Target | Ta2O5 | 3N5-4N |
| Terbium Oxide - Sputtering Target | Tb4O7 | 2N5-5N TREO: 2Nmin |
| Thulium Oxide - Sputtering Target | Tm2O3 | 2N5-5N TREO: 2Nmin |
| Titanium Oxide - Sputtering Target | TiO | 3N |
| Titanium Oxide - Sputtering Target | TiO2 | 2N-4N |
| Titanium Oxide - Sputtering Target | Ti2O3 | 3N5 |
| Titanium Oxide - Sputtering Target | Ti3O5 | 2N5-4N |
| Tungsten Oxide - Sputtering Target | WO3 | 3N |
| Vanadium Oxide - Sputtering Target | V2O5 | 3N |
| Yttrium Oxide - Sputtering Target | Y2O3 | 2N-5N TREO: 2N-3N5 |
| Ytterbium Oxide - Sputtering Target | Yb2O3 | 2N-4N TREO: 2N |
| Zinc Oxide - Sputtering Target | ZnO | 3N |
| Zirconium Oxide - Sputtering Target | ZrO2 | 3N-4N |
| Zirconium Titantium Oxide - Sputtering Target | ZrO2 + TiO2 | 4N |
| Zirconium Silicon Oxide - Sputtering Target | ZrO2 + SiO2 | 4N |
| Yttria Stabilized Zirconia - Sputtering Target | YSZ | 4N |
